Mochini oa Lithography Mask Aligner Photo-Etching Machine
Kenyelletso ea sehlahisoa
Mohloli o khanyang oa leseli o amohela khanya ea UV e tsoang kantle ho naha le mojule oa sebopeho sa mohloli o bobebe, o nang le mocheso o monyane le botsitso bo botle ba mohloli oa leseli.
Sebopeho sa mabone se kentsoeng se na le phello e ntle ea ho senya mocheso le mohloli o haufi oa mohloli o haufi, 'me phetoho le tlhokomelo ea lebone la mercury li bonolo ebile li bonolo. E na le microscope e phahameng ea "binocular dual field microscope" le LCD ea skrine ea 21 inch ka bophara, e ka hokahanngoa ka pono
sets'oants'o sa mahlo kapa sets'oants'o sa CCD +, se nang le ho nepahala ho hoholo, ts'ebetso e hlakileng le ts'ebetso e bonolo.
Likaroloana
Ka ts'ebetso ea likhechana tsa ho sebetsa
Khatello ea boemo ba ho ikopanya e tiisa ho pheta-pheta ka sensor
Lekhalo la ho hokahanya le lekhalo la ho pepeseha le ka beoa ka dijithale
Ho sebelisa ts'ebetso e kentsoeng ea komporo + ea touch screen, e bonolo ebile e bonolo, e ntle ebile e mosa
Hula poleiti ea holimo le tlase, e bonolo ebile e bonolo
Ts'ehetso ea ho kopana le vacuum, ho pepeseha ka thata ho kopana, ho pepesehela khatello ea maikutlo le ho ba haufi
Ka nano imprint interface function
Ho pepeseha ha lesela le le leng ka senotlolo se le seng, boemo bo phahameng ba boiketsetso
Mochini ona o na le ts'epo e ntle le pontšo e bonolo, haholo-holo e loketseng ho ruta, lipatlisiso tsa mahlale le lifeme likolecheng le liunivesithing.
Lintlha tse ling
Tlhaloso
1. Sebaka sa ho pepeseha: 110mm × 110mm;
2. ★ Exposure wavelength: 365nm;
3. Qeto: ≤ 1m;
4. Ho nepahala ha ho tsamaisana: 0.8m;
5.Lethathamo la motsamao oa tafole ea ho skena ea sistimi ea tekano bonyane e tla kopana: Y: 10mm;
6. Li-tubes tse khanyang le tse nepahetseng tsa tsamaiso ea ho tsamaisana li ka tsamaea ka thoko ho X, y le Z directions, X tataiso: ± 5mm, Y tataiso: ± 5mm le Z tataiso: ± 5mm;
7. Mask size: 2,5 inches, 3 inches, 4 inches, 5 inches;
8. Boholo ba mohlala: sekhechana, 2 ", 3", 4 ";
9. ★ E loketse bakeng sa botenya ba sampuli: 0.5-6mm, 'me e ka tšehetsa likotoana tsa 20mm ka ho fetisisa (e tloahelehileng);
10. Mokhoa oa ho pepeseha: nako (mokhoa oa ho bala);
11. Ho se tšoane ha mabone: ＜ 2.5%;
12. Tšimo e 'meli ea microscope ea ts'ebetso ea CCD: lense ea zoom (makhetlo a 1-5) + lense ea sepheo sa microscope;
13. Leqeba la ho sisinyeha ha mask le amanang le sampuli bonyane le tla kopana: X: 5mm; Y: 5mm; : 6º;
14. ★ Boima ba matla a pepeneneng: > 30MW / cm2,
15. ★ Boemo ba ho tsamaisana le boemo ba ho pepeseha bo sebetsa liteisheneng tse peli, 'me li-switch tse peli tsa servo motor li fetoha ka tsela e iketsang;
16. Khatello ea ho kopana le Leveling e tiisa ho pheta-pheta ka kutlo;
17. ★ Lekhalo la ho hokahanya le lekhalo la ho pepeseha le ka beoa ka mokhoa oa dijithale;
18. ★ E na le nano imprint segokanyimmediamentsi sa sebolokigolo le haufi segokanyimmediamentsi sa sebolokigolo;
19. ★ Tshebetso ea skrine ea ho ama;
20. Tekanyo e akaretsang: E ka bang 1400mm (bolelele) 900mm (bophara) 1500mm (bophahamo).
